ドラム式 UHV セル、コンタクト法-新開発

Optical Bonding Ultra-High Vacuum DRUM-type Cell


With Optical Bonding (optical contact) process, Ultra-High-Vacuum（UHV) cell as high as 10^(-12) mBar.L/sec, (or 10^(-13) PaM3/sec has succeeded. We are rich-experienced in 2x2x2～80x80x400mm UHV cells. Pyrex and Quartz etc can be used according to application.