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ドラム式 UHV セル、コンタクト法


Optical Bonding Ultra-High Vacuum DRUM-type Cell


With Optical Bonding (optical contact) process, Ultra-High-Vacuum(UHV) cell as high as 10^(-12) mBar.L/sec, (or 10^(-13) PaM3/sec has succeeded. We are rich-experienced in 2x2x2~80x80x400mm UHV cells. Pyrex and Quartz etc can be used according to application.
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